Q Series

  • Product Type: Deionized Water Heaters

     

     
    Ultrapure Heating for Batch Manufacturing Process 
    Trebor’s exclusive electric quartz DI water heating technology is trusted for long life, low maintenance and high purity. This market-leading technology is now available in the affordable Q-Series heater – a system ideal for batch cleaning applications requiring a steady flow of high purity DI water on demand. Hot DI water has been proven to improve cleaning efficiency, enhance process stability, and increase production throughput.
     
    The modular Q-Series heater has a high purity flow path of quartz and fluoropolymer components and versatile configurations to meet a broad range of wattage and voltage requirements. A straight-forward user interface and multiple remote control options ensure that we have a system compatible with your manufacturing process.
     
    Contact your local Trebor representative to see how the Q-Series can provide the best value solution for your high purity DI water heating applications.
     

     
    Market Applications
     
    ♦ Semiconductor
    ♦ Solar Cell (PV)
    ♦ MEMS
    ♦ Flat Panel
    ♦ Optoelectronics
     

     
    Product Features
     
    ♦ LEADING EDGE TECHNOLOGY - Patented thin-film on quartsz electrical resistance heater element provides exceptional temperature response and improved reliability over IR heating which requires frequent bulb change outs. The propriety design has no metal exposure and virtually eliminates contamination risk in the event of element failure, unlike most immersion style heaters. No external air or nitrogen purge is required.
     
    ♦ VERSATILE CONTROL OPTIONS - Standard Modbus/RTU-serial communication. Many other remote system monitoring and control options available to meet virtually communication requirements and protocols.
     
    ♦ COMPACT & CONVENIENT - The modular element allows for very compact system design and can be changed out in less than 15 minutes when required. Simple control interface provides easy user input and diagnostic feedback.
     
    ♦ HIGH PERFORMANCE - Efficient heat transfer and low resident fluid volume in each heater module produces fast response to changes in flow or temperature set point using a PID control with zero crossfire SSRs.
     
    ♦ ULTRA CLEAN DESIGN - High purity flow path of GE 214 semiconductor grade quartz, PTFE, PFA, and PVDF with no elastomer o-rings.
     
    ♦ SAFETY COMPLIANT - TUV third party compliance testing and inspection to CE, SEMI S2 & S8, and NFPA79 standards.
     

     
       Specifications
    Heater Type
    Thin-film on quartz electric resistive heating
    Voltages
    208,380,415,480 Volt; 50/60 Hz
    Temperature Limit
    95
    Temperature Control
    ±0.5 in most conditions
    Pressure Range
    15 to 60 PSI DI water supply
    Flow Rate
    1 to 45 LPM (.25 to 12 GPM); depending on system size
    Efficiency
    >98%
    Element Life
    >20,000 hrs
    Control System
    Zero crossfire SSRs with multi-loop PID control
    Communication Options
    Modbus/RTU - Serial (standard),
    Modbus/TCP - Ethernet, DeviceNet
    Wetted Surfaces
    GE 214 quartz, PTFE, PFA, & PVDF - no elastomer O-rings
    Safety Features
    Low pressure shutdown
     
    Low liquid level detection shutdown
     
    Redundant over temperature protection
     
    Over pressure relief
     
    Open thermocouple detection
     
    Automatic power shutdown
     
    EMO
     
    GFI/Earth Leakage
    Certifications
    SEMI S2-0703   CE
     
    SEMI S8-0701   NFPA79
    Warranty
    1-year standard, extended warranties available
     
     

     
     
     
     
     

     
    Benefits of Using Hot DI Water
     
    ♦ improved cleaning efficiency
    ♦ Faster substrate drying times
    ♦ Better process consistency
    ♦ Increased production throughtput
    ♦ Reduced water consumption
     

     
    How to Size Your Heater
     
    in order to determine which heater size you need, determine the kW required with the following formula:
     
    Required kW = 0.264(Flow) (Temp Delta °C)
     
    Heater Sizing Formula Example
     
    Ambient Water Temp         =25°C
    Desired Process Temp      =70°C
    Temperature Delta             =45°C
     
    Required kW = 0.264 (4 GPM) (45°C) = 47.5 kW
     
    For optimal temperature response and to compensate for seasonal changes in ambient water temperature, we recommend adding 20% excess heating capacity.
     
    47.5 kW(1.2) = 57 kW >>> Trebor recommends a 60 kW heater for this application
     

     
    Use the code numbers for ordering the following options for your Q-Series Heater.
    HEATER
    Q
    Q-Series Batch Heater
    POWER
    30                                
    36                                
    060
    072
    090
    108
    120
    144
    30 kW
    36 kW
    60 kW
    72 kW
    90 kW
    108 kW
    120 kW
    144 kW
    VOLTAGE
    V208
    V380
    V415
    V480
    208VAC 50/60 Hz, 3 phase
    380VAC 50/60 Hz, 3 phase
    415VAC 50/60 Hz, 3 phase
    480VAC 50/60 Hz, 3 phase
    PLUMBING
    A
    B
    ALL PFA
    PVDF and PFA
    OPTIONS
    00
    No option added
     
    Q
    144
    V480
    B
    00
    Example of an order number based on configuration options.  

     

Deionized Water Heaters

 

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