Ideal for single-wafer wet process applications, the Trebor® Purus CP is a two-chamber, cross-phase discharge diaphragm pump that synchronizes the dual pumping action to minimize fluctuations in pressure and flow while continually delivering superior flow stability. Even without a pulsation dampener, the Purus CP achieves flow stability similar to expensive centrifugal pumps.
Applications
Semiconductor/Electronics
Performance Summary
Differential Pressure, Max: 60 psig
Flow Rate, Max: 1.6 gpm
Product Sub Category: N/A
Suction Lift, Dry: 11 ft
Temperature: 0 min 248 max °F
Weight: 4 lbs
Product Features
• Stable flow and pressure to ensure consistent performance
• Suction capable - locate the pump in a convenient location
• Continuous dry-run and dead-head capable
• Low particle generation
• Simple controls
• Two year, no-maintenance operation
Construction
• Ultrapure - no metal parts and no elastomeric o-rings
• 100% PTFE/PFA fluid path
• Integral leak & cycle diagnostics
• Small footprint; lightweight
• Cleanroom assembled, tested, and packaged
